Defect generation in ultrathin SiON/ZrO2 gate dielectric stacks

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Authors

Houssa, M.; Autran, J.L.; Afanasiev, Valeri; Stesmans, Andre; Heyns, Marc

Issue

12

Journal

Journal of the Electrochemical Society

Volume

149

Title

Defect generation in ultrathin SiON/ZrO2 gate dielectric stacks

Publication type

Journal article

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