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High quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes

dc.contributor.authorJohnson, Jo
dc.contributor.authorCella, Silvia
dc.contributor.authorLisoni, Judit
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-14T21:56:23Z
dc.date.available2021-10-14T21:56:23Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6445
dc.sourceIIOimport
dc.titleHigh quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes
dc.typeOral presentation
dc.contributor.imecauthorEveraert, Jean-Luc
dc.source.peerreviewno
dc.source.conferenceMRS Fall Meeting Symposium U: Ferroelectric Thin Films XI
dc.source.conferencedate1/12/2002
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesNot publ. in proceedings


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