Publication:
Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices
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1910 since deposited on 2021-10-14
1last month
Acq. date: 2026-08-19
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Statistics
Views
1910 since deposited on 2021-10-14
1last month
Acq. date: 2026-08-19
Citations