Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices

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Authors
Jourdain, Anne; De Moor, Piet; Pamidighantam, Sayanu; Tilmans, Harrie
Conference
15th IEEE International Conference on Micro Electro Mechanical Systems
Title
Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices
Publication type
Proceedings paper
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