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Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices

dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorPamidighantam, Sayanu
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-14T21:58:05Z
dc.date.available2021-10-14T21:58:05Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6456
dc.sourceIIOimport
dc.titleInvestigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage677
dc.source.endpage680
dc.source.conference15th IEEE International Conference on Micro Electro Mechanical Systems
dc.source.conferencedate20/01/2002
dc.source.conferencelocationLas vegas, NV USA
imec.availabilityPublished - imec


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