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Optimization of design and technology for uncooled polySiGe microbolometer arrays

dc.contributor.authorLeonov, Vladimir
dc.contributor.authorPerova, Natalia
dc.contributor.authorVermeiren, Jan
dc.contributor.authorGrietens, Bob
dc.contributor.authorGoessens, Claus
dc.contributor.authorDe Moor, Piet
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-14T22:11:14Z
dc.date.available2021-10-14T22:11:14Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6532
dc.sourceIIOimport
dc.titleOptimization of design and technology for uncooled polySiGe microbolometer arrays
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorPerova, Natalia
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.beginpage122
dc.source.endpage133
dc.source.conferenceInfrared Detectors and Focal Plane Arrays VII
dc.source.conferencelocation
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol.4721


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