Oxygen barrier for stacked SBT-FeCAP on W-plug

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Authors
Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk; Casella, Patrizia; Corvasce, C.; Zambrano, R.; Monchoix, H.; Van Autryve, L.
Conference
International Joint Conference on the Application of Ferroelectrics - IFFF
Title
Oxygen barrier for stacked SBT-FeCAP on W-plug
Publication type
Meeting abstract
Embargo date
9999-12-31
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