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Oxygen barrier for stacked SBT-FeCAP on W-plug

dc.contributor.authorLisoni, Judit
dc.contributor.authorMaes, David
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorJohnson, Jo
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCasella, Patrizia
dc.contributor.authorCorvasce, C.
dc.contributor.authorZambrano, R.
dc.contributor.authorMonchoix, H.
dc.contributor.authorVan Autryve, L.
dc.date.accessioned2021-10-14T22:13:20Z
dc.date.available2021-10-14T22:13:20Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6544
dc.sourceIIOimport
dc.titleOxygen barrier for stacked SBT-FeCAP on W-plug
dc.typeMeeting abstract
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage274
dc.source.conferenceInternational Joint Conference on the Application of Ferroelectrics - IFFF
dc.source.conferencedate28/05/2002
dc.source.conferencelocationNara Japan
imec.availabilityPublished - open access
imec.internalnotesPaper 31A-TF7-3C; Abstract no. 477


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