Authors

Lucci, Luca; Pantisano, Luigi; Cartier, Eduard; Kerber, Andreas; Groeseneken, Guido; Ho, M.Y.; Green, Martin; Selmi, L.

Conference

33rd IEEE Semiconductor Interface Specialists Conference - SISC

Title

Polarity dependent charge trapping in thin SiO2/Al2O3 gate staks with poly-Si gate electrodes: influence of high temperature annealing

Publication type

Oral presentation