Impact of ALCVD and PVD titanium nitride deposition on metal gate capacitors

Thumbnail
View/open
Metadata
Show full item record
Authors
Lujan, Guilherme; Schram, Tom; Pantisano, Luigi; Hooker, Jacob; Kubicek, Stefan; Röhr, Erika; Schuhmacher, Jörg; Kilpela, Olli; Sprey, Hessel; De Gendt, Stefan; De Meyer, Kristin
Conference
ESSDERC - 32nd European Solid-State Device Research Conference
Title
Impact of ALCVD and PVD titanium nitride deposition on metal gate capacitors
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections