Publication:

Impact of ALCVD and PVD titanium nitride deposition on metal gate capacitors

Date

2002

Proceedings Paper

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Files

6321.pdf 170.82 KB

Author(s)

Lujan, Guilherme

;

;

Pantisano, Luigi

;

;

Kubicek, Stefan

;

;

Schuhmacher, Jörg

;

;

;

De Gendt, Stefan

;

De Meyer, Kristin

Statistics

2032 since deposited on 2021-10-14

Acq. date: 2026-02-26