A novel approach to characterise a low-k dielectric polymer surface

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Authors
Martin Hoyas, Ana; Schuhmacher, Jorg; Le, Quoc Toan; Whelan, Caroline; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen
Conference
2nd International Symposium on Polymers Surface Characterization
Title
A novel approach to characterise a low-k dielectric polymer surface
Publication type
Proceedings paper
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