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A novel approach to characterise a low-k dielectric polymer surface

dc.contributor.authorMartin Hoyas, Ana
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorWhelan, Caroline
dc.contributor.authorSchaekers, Marc
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T22:20:49Z
dc.date.available2021-10-14T22:20:49Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6585
dc.sourceIIOimport
dc.titleA novel approach to characterise a low-k dielectric polymer surface
dc.typeProceedings paper
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewno
dc.source.conference2nd International Symposium on Polymers Surface Characterization
dc.source.conferencedate11/11/2002
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - imec


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