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A novel approach to characterization of a low-k dielectric polymer surface

dc.contributor.authorMartin Hoyas, Ana
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorWhelan, Caroline
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCarbonell, Laure
dc.contributor.authorSchaekers, Marc
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T22:21:01Z
dc.date.available2021-10-14T22:21:01Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6586
dc.sourceIIOimport
dc.titleA novel approach to characterization of a low-k dielectric polymer surface
dc.typeOral presentation
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewno
dc.source.conferencePh.D. Symposium
dc.source.conferencedate11/12/2002
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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