Characterisation of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy

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Authors

Nohira, Hiroshi; Tsai, Wilman; Besling, Wim; Young, Edward; Pétry, Jasmine; Conard, Thierry; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Maes, Jos; Tuominen, Marko

Issue

1

Journal

Journal of Non-Crystalline Solids

Volume

303

Title

Characterisation of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy

Publication type

Journal article

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