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A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
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Authors
Pamidighantam, Sayanu
;
Laureyn, Wim
;
Salah, Ahmed
;
Verbist, Agnes
;
Tilmans, Harrie
Conference
15th IEEE International Conference on Micro Electro Mechanical Systems
Title
A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
Publication type
Proceedings paper
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