Publication:
A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
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1951 since deposited on 2021-10-14
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Acq. date: 2025-10-25
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Views
1951 since deposited on 2021-10-14
410item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations