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A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing

dc.contributor.authorPamidighantam, Sayanu
dc.contributor.authorLaureyn, Wim
dc.contributor.authorSalah, Ahmed
dc.contributor.authorVerbist, Agnes
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-14T22:41:16Z
dc.date.available2021-10-14T22:41:16Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6689
dc.sourceIIOimport
dc.titleA novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage661
dc.source.endpage664
dc.source.conference15th IEEE International Conference on Micro Electro Mechanical Systems
dc.source.conferencedate20/01/2002
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - imec


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