Authors

Peto, G.; Molnar, G.; Kotai, E.; Dezsi, I.; Karsteen, M.; Sodervall, U.; Willander, M.; Caymax, Matty; Loo, Roger

Issue

1

Journal

Applied Physics Letters

Volume

81

Title

Formation of epitaxial CoSi2 films on Si and on Si/Si80Ge20 (100) by reactive deposition epitaxy

Publication type

Journal article