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Formation of epitaxial CoSi2 films on Si and on Si/Si80Ge20 (100) by reactive deposition epitaxy
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Formation of epitaxial CoSi2 films on Si and on Si/Si80Ge20 (100) by reactive deposition epitaxy
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Peto, G.
;
Molnar, G.
;
Kotai, E.
;
Dezsi, I.
;
Karsteen, M.
;
Sodervall, U.
;
Willander, M.
;
Caymax, Matty
;
Loo, Roger
Journal
Applied Physics Letters
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1991
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-09
Citations
Metrics
Views
1991
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-09
Citations