Authors

Poyai, Amporn; Simoen, Eddy; Claeys, Cor; Huber, A.; Gräf, D.; Gaubas, Eugenijus

Conference

Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology

Title

Impact of state-of-the-art Cz substrates on the current-voltage characteristics of shallow p-n junctions

Publication type

Proceedings paper