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Impact of state-of-the-art Cz substrates on the current-voltage characteristics of shallow p-n junctions

dc.contributor.authorPoyai, Amporn
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorHuber, A.
dc.contributor.authorGräf, D.
dc.contributor.authorGaubas, Eugenijus
dc.date.accessioned2021-10-14T22:51:57Z
dc.date.available2021-10-14T22:51:57Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6741
dc.sourceIIOimport
dc.titleImpact of state-of-the-art Cz substrates on the current-voltage characteristics of shallow p-n junctions
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage695
dc.source.endpage704
dc.source.conferenceSemiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology
dc.source.conferencedate13/05/2002
dc.source.conferencelocationPhiladelphia, PA USA
imec.availabilityPublished - imec
imec.internalnotesElectrochemical Society Proceedings; Vol. 2002-2


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