Publication:
A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
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2088 since deposited on 2021-10-14
2last month
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Acq. date: 2026-01-09
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Views
2088 since deposited on 2021-10-14
2last month
1last week
Acq. date: 2026-01-09
Citations