Authors

Satta, Alessandra; Schuhmacher, Jörg; Whelan, Caroline; Vandervorst, Wilfried; Brongersma, Sywert; Beyer, Gerald; Brijs, Bert; Conard, Thierry; Maex, Karen; Vantomme, Andre; Viitanen, M.M.; Brongersma, H.H.

Conference

B-ALD-5: The 5th Baltic Symposium on Atomic Layer Deposition

Title

A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates

Publication type

Meeting abstract