Show simple item record

Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior

dc.contributor.authorSchmolke, R.
dc.contributor.authorBlietz, M.
dc.contributor.authorHölzl, R.
dc.contributor.authorMenzel, D.
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-14T23:04:27Z
dc.date.available2021-10-14T23:04:27Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6800
dc.sourceIIOimport
dc.titleBulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage658
dc.source.endpage669
dc.source.conferenceSemiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology
dc.source.conferencedate12/05/2002
dc.source.conferencelocationPhiladelphia, PA USA
imec.availabilityPublished - imec
imec.internalnotesElectrochemical Society Proceedings; Vol. 2002-2


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record