Evaluation of Ta(N) diffusion barrier integrity on porous low-k films

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Authors
Shamiryan, Denis; Baklanov, Mikhaïl; Tokei, Zsolt; Iacopi, Francesca; Maex, Karen
Conference
Advanced Metallization Conference 2001
Title
Evaluation of Ta(N) diffusion barrier integrity on porous low-k films
Publication type
Proceedings paper
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