Authors

Simoen, Eddy; Claeys, Cor; Job, R.; Ulyashin, A.G.; Fahrner, W.R.; De Gryse, O.; Clauws, P.

Issue

10

Journal

Applied Physics Letters

Volume

81

Title

Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon

Publication type

Journal article