Authors

Tokei, Zsolt; Lanckmans, Filip; Van den Bosch, Geert; Van Hove, Marleen; Maex, Karen; Bender, Hugo; Hens, S.; Van Landuyt, J.

Conference

Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA

Title

Reliability of copper dual damascene influenced by pre-clean

Publication type

Proceedings paper