Publication:

Reliability of copper dual damascene influenced by pre-clean

Date

2002
Proceedings Paper
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Author(s)

Tokei, Zsolt  
;
Lanckmans, Filip
;
Van den Bosch, Geert  
;
Van Hove, Marleen
;
Maex, Karen  
;
Bender, Hugo  
;
Hens, S.
;
Van Landuyt, J.

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1911 since deposited on 2021-10-14
Acq. date: 2025-12-08

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1911 since deposited on 2021-10-14
Acq. date: 2025-12-08

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