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Barrier process development for damascene integration of porous SiLK resin films

dc.contributor.authorTokei, Zsolt
dc.contributor.authorWaeterloos, Joost
dc.contributor.authorIacopi, Francesca
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T23:23:03Z
dc.date.available2021-10-14T23:23:03Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6886
dc.sourceIIOimport
dc.titleBarrier process development for damascene integration of porous SiLK resin films
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage307
dc.source.endpage311
dc.source.conferenceAdvanced Metallization Conference 2001
dc.source.conferencedate9/10/2001
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec
imec.internalnotesConference Proceedings ULSI XVII


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