Publication:
Barrier process development for damascene integration of porous SiLK resin films
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2068 since deposited on 2021-10-14
9last month
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Acq. date: 2026-08-18
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Statistics
Views
2068 since deposited on 2021-10-14
9last month
1last week
Acq. date: 2026-08-18
Citations