Publication:

Barrier process development for damascene integration of porous SiLK resin films

Date

2002
Proceedings Paper
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dc.contributor.authorTokei, Zsolt
dc.contributor.authorWaeterloos, Joost
dc.contributor.authorIacopi, Francesca
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-14T23:23:03Z
dc.date.available2021-10-14T23:23:03Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6886
dc.source.beginpage307
dc.source.conferenceAdvanced Metallization Conference 2001
dc.source.conferencedate9/10/2001
dc.source.conferencelocationMontreal Canada
dc.source.endpage311
dc.title

Barrier process development for damascene integration of porous SiLK resin films

dc.typeProceedings paper
dspace.entity.typePublication
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