Publication:

Barrier process development for damascene integration of porous SiLK resin films

Date

2002

Proceedings Paper

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Author(s)

;

Waeterloos, Joost

;

Iacopi, Francesca

;

Caluwaerts, Rudy

;

Struyf, Herbert

;

Van Aelst, Joke

;

Statistics

2058 since deposited on 2021-10-14

Acq. date: 2026-02-26