Authors

Tsai, Wilman; Chen, Jian; Carter, Richard; Cartier, Eduard; Kluth, Jon; Richard, Olivier; Claes, Martine; Lin, Steven; Nohira, Hiroshi; Conard, Thierry; Caymax, Matty; Young, Edward; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Manabe, Yukiko; Maes, Jan; Rittersma, Chris; Besling, Wim; Roozeboom, F.

Conference

Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology

Title

Integration issues of polysilicon with high k dielectrics deposited by Atomic Layer Chemical Vapor Deposition

Publication type

Proceedings paper