Publication:

Recent advancements in 157nm resist performance

Date

2002
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Author(s)

Turnquest, K.
;
Graffenberg, V.
;
Patel, S.
;
Miller, D.
;
Dean, K.
;
Goethals, Mieke
;
Van Roey, F.
;
Hermans, J.
;
Ronse, Kurt  
;
Wong, P.
;
Hansen, S.

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