Publication:

70 nm fully-depleted SOI cmos using a new fabrication scheme: the spacer/replacer scheme

Date

2002
Proceedings Paper
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Author(s)

van Meer, Hans
;
De Meyer, Kristin  

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1965 since deposited on 2021-10-14
Acq. date: 2026-06-24

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1965 since deposited on 2021-10-14
Acq. date: 2026-06-24

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