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Conference contributions
70 nm fully-depleted SOI cmos using a new fabrication scheme: the spacer/replacer scheme
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70 nm fully-depleted SOI cmos using a new fabrication scheme: the spacer/replacer scheme
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Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Meer, Hans
;
De Meyer, Kristin
Journal
Abstract
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1961
since deposited on 2021-10-14
Acq. date: 2026-01-07
Citations
Metrics
Views
1961
since deposited on 2021-10-14
Acq. date: 2026-01-07
Citations