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Physical characterisation of high-gate stacks
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Authors
Vandervorst, Wilfried
;
Bender, Hugo
;
Conard, Thierry
;
Richard, Olivier
;
Zhao, Chao
;
Brijs, Bert
;
Caymax, Matty
;
De Gendt, Stefan
;
Cosnier, Vincent
;
Chen, Jerry
;
Kluth, J.
;
Cartier, Eduard
;
Green, Martin
Conference
MRS Fall Meeting Symposium N: Novel Materials and Processes for Advanced CMOS
Title
Physical characterisation of high-gate stacks
Publication type
Oral presentation
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