Publication:

RPN oxynitride gate dielectrics for 90nm low power CMOS applications

Date

2002

Proceedings Paper

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Files

6310.pdf 292.12 KB

Author(s)

Veloso, Anabela

;

;

Cubaynes, Florence

;

Rooyackers, Rita

;

;

Rothschild, Aude

;

Schaekers, Marc

;

;

;

;

Badenes, Gonçal

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Acq. date: 2026-10-13