Authors

Kissinger, G.; Vanhellemont, Jan; Gräf, D.; Zulehner, W.; Claeys, Cor; Richter, H.

Conference

ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo

Title

Investigation of crystal defects in As-grown and processed silicon wafers and heteroepitaxial layers by infrared light scattering

Publication type

Proceedings paper

Embargo date

9999-12-31