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Oxygen barrier for stacked SBT-FeCAP on W-plugs

dc.contributor.authorZambrano, R.
dc.contributor.authorCasella, Patrizia
dc.contributor.authorCorvasce, C.
dc.contributor.authorMonchoix, Hervé
dc.contributor.authorVan Autryve, Luc
dc.contributor.authorLisoni, Judit
dc.contributor.authorMaes, David
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorJohnson, Jo
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-15T00:11:12Z
dc.date.available2021-10-15T00:11:12Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7092
dc.sourceIIOimport
dc.titleOxygen barrier for stacked SBT-FeCAP on W-plugs
dc.typeOral presentation
dc.contributor.imecauthorVan Autryve, Luc
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.source.peerreviewno
dc.source.conferenceSilicon Workshop
dc.source.conferencedate6/02/2002
dc.source.conferencelocationGenova Italy
imec.availabilityPublished - imec


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