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Comparative analysis of the nucleation and growth of copper on different low-k polymers

dc.contributor.authorZaporojtchenko, V.
dc.contributor.authorErichsen, J.
dc.contributor.authorStrunskus, T.
dc.contributor.authorBehnke, K.
dc.contributor.authorFaupel, F.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T00:11:27Z
dc.date.available2021-10-15T00:11:27Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7093
dc.sourceIIOimport
dc.titleComparative analysis of the nucleation and growth of copper on different low-k polymers
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpageL8.1
dc.source.conferenceMaterials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II
dc.source.conferencedate16/04/2001
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 714E (Online Proceedings)


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