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Structural characterization of ALCVD ZrO2/Al2O3 nano-laminate deposits with high temperature grazing incidence XRD and TEM
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Authors
Zhao, Chao
;
Richard, Olivier
;
Maes, Jos
;
Roebben, G.
;
Bender, Hugo
;
De Gendt, Stefan
;
Caymax, Matty
;
Vandervorst, Wilfried
;
Heyns, Marc
;
Van Der Biest, O.
Conference
E-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and Devices
Title
Structural characterization of ALCVD ZrO2/Al2O3 nano-laminate deposits with high temperature grazing incidence XRD and TEM
Publication type
Oral presentation
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