Authors

Zhichun, Wang; Ackaert, J.; Salm, C.; de Backer, E.; Van den Bosch, Geert; Zawalski, Wade

Conference

Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA

Title

Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide

Publication type

Proceedings paper