Characterization of tunnel oxides for non-volatile memory (NVM) applications

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Authors
Ackaert, Jan; Vermeulen, Tom; Lowe, Antony; Boonen, Sylvie; Yao, Thierry; Prasad, Jagdish; Thomason, Mike; Van Houdt, Jan; Degraeve, Robin; Haspeslagh, Luc; Hendrickx, Paul
Conference
Proceedings International Semiconductor Device Research Symposium
Title
Characterization of tunnel oxides for non-volatile memory (NVM) applications
Publication type
Proceedings paper
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