Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Trends beim Einbau von MEMS auf Wafer-Ebene
Publication:
Trends beim Einbau von MEMS auf Wafer-Ebene
Copy permalink
Date
2003-11
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baert, Kris
;
De Moor, Piet
;
Tilmans, Harrie
;
John, Joachim
;
Witvrouw, Ann
;
Van Hoof, Chris
;
Beyne, Eric
;
Van Bavel, Mieke
Journal
Elektronik Produktion und Prüftechnik
Abstract
Description
Metrics
Views
1851
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1851
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-16
Citations