Trends in wafer-level packaging of MEMS

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Authors
Baert, Kris; De Moor, Piet; Tilmans, Harrie; John, Joachim; Witvrouw, Ann; Van Hoof, Chris; Beyne, Eric; Van Bavel, Mieke
Issue
Oct.
Journal
Onboard Technology
Title
Trends in wafer-level packaging of MEMS
Publication type
Journal article
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