Authors

Caymax, Matty; Poortmans, Jef; Van Ammel, Annemie; Vanhellemont, Jan; Libezny, Milan; Nijs, Johan; Mertens, Robert

Issue

1_2

Journal

Thin Solid Films

Volume

241

Title

On the relation between low-temperature epitaxial growth conditions and the surface morphology of epitaxial Si and Si1-xGex layers, grown in an ultrahigh vacuum, very low pressure chemical vapour deposition reactor

Publication type

Journal article

Embargo date

9999-12-31