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Role of hydrogen in separation of porous Si layer in a layer transfer process
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Authors
Bilyalov, Renat
;
Solanki, Chetan Singh
;
Poortmans, Jef
;
Ulyashin, A.
;
Job, R.
;
Fahrne, W.
Issue
1
Journal
Physica Status Solidi A
Volume
197
Title
Role of hydrogen in separation of porous Si layer in a layer transfer process
Publication type
Journal article
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