Authors

Li, Li; Bender, Hugo; Trenkler, Thomas; Mertens, Paul; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc

Issue

3

Journal

Journal of Applied Physics

Volume

77

Title

Surface passivation and microroughness of (100) silicon etched in aqueous hydrogen halide (HF, HCl, HBr, Hl) solutions

Publication type

Journal article