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Surface passivation and microroughness of (100) silicon etched in aqueous hydrogen halide (HF, HCl, HBr, Hl) solutions
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2061 since deposited on 2021-09-29
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Acq. date: 2025-10-24
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Views
2061 since deposited on 2021-09-29
410item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations