Publication:

C-AFM Characterization of the dependance of AlHfOx electrical behaviour on post deposition annealing temperature

Date

2003
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Blasco, X.
;
Petry, Jasmine
;
Nafria, M.
;
Aymerich, X.
;
Vandervorst, Wilfried  

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2065 since deposited on 2021-10-15
Acq. date: 2025-10-23

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2065 since deposited on 2021-10-15
Acq. date: 2025-10-23

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