Spectroellipsometric characterisation of thin epitaxial Si1-x Gex layers

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Authors

Libezny, Milan; Caymax, Matty; Brablec, A.; Kubena, J.; Holy, V.; Poortmans, Jef; Nijs, Johan; Vanhellemont, Jan

Issue

10

Journal

Materials Science and Technology

Volume

11

Title

Spectroellipsometric characterisation of thin epitaxial Si1-x Gex layers

Publication type

Journal article

Embargo date

9999-12-31

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