Tolerance control for photonic crystal structures fabricated with deep UV lithography

Thumbnail
View/open
Metadata
Show full item record
Authors
Bogaerts, Wim; Dumon, Pieter; Wiaux, Vincent; Wouters, Johan M. D.; Beckx, Stephan; Baets, Roel
Conference
Proceedings 29th European Conference on Optical Communication - ECOC
Title
Tolerance control for photonic crystal structures fabricated with deep UV lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections