Show simple item record

Tolerance control for photonic crystal structures fabricated with deep UV lithography

dc.contributor.authorBogaerts, Wim
dc.contributor.authorDumon, Pieter
dc.contributor.authorWiaux, Vincent
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorBeckx, Stephan
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-15T04:02:40Z
dc.date.available2021-10-15T04:02:40Z
dc.date.issued2003-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7233
dc.sourceIIOimport
dc.titleTolerance control for photonic crystal structures fabricated with deep UV lithography
dc.typeProceedings paper
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage46
dc.source.endpage47
dc.source.conferenceProceedings 29th European Conference on Optical Communication - ECOC
dc.source.conferencedate21/09/2003
dc.source.conferencelocationRimini Italy
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
8558.pdf
Size:
165.5Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record