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Structural and electrical characterization of FeSix-layers (1 < X < 2) prepared by RTA of Fe layers sputtered on Si (100)
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Authors
Libezny, Milan
;
Poortmans, Jef
;
Amesz, Peter Henk
;
Alves Donaton, Ricardo
;
Larsen, Kim Kyllesbech
;
Vandenabeele, Peter
;
Jonckx, Franky
;
Maex, Karen
;
Nijs, Johan
Conference
Rapid Thermal and Integrated Processing IV
Title
Structural and electrical characterization of FeSix-layers (1 < X < 2) prepared by RTA of Fe layers sputtered on Si (100)
Publication type
Proceedings paper
Embargo date
9999-12-31
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