dc.contributor.author | Libezny, Milan | |
dc.contributor.author | Poortmans, Jef | |
dc.contributor.author | Amesz, Peter Henk | |
dc.contributor.author | Alves Donaton, Ricardo | |
dc.contributor.author | Larsen, Kim Kyllesbech | |
dc.contributor.author | Vandenabeele, Peter | |
dc.contributor.author | Jonckx, Franky | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | Nijs, Johan | |
dc.date.accessioned | 2021-09-29T13:09:20Z | |
dc.date.available | 2021-09-29T13:09:20Z | |
dc.date.issued | 1995 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/725 | |
dc.source | IIOimport | |
dc.title | Structural and electrical characterization of FeSix-layers (1 < X < 2) prepared by RTA of Fe layers sputtered on Si (100) | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Poortmans, Jef | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 389 | |
dc.source.endpage | 394 | |
dc.source.conference | Rapid Thermal and Integrated Processing IV | |
dc.source.conferencedate | 17/04/1995 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | MRS Symposium Proceedings; Vol. 387 | |