Authors

Libezny, Milan; Poortmans, Jef; Dekoster, J.; Degroote, S.; Vantomme, Andre; de Lange, B. G. M.; Langouche, G.; Nijs, Johan

Conference

Rapid Thermal and Integrated Processing IV

Title

RTA-preparation of b-FeSi2 layers from MBE-grown FeSi films deposited on SiGe(100) substrates

Publication type

Proceedings paper

Embargo date

9999-12-31